Particle inspection systems

Achieves high-sensitivity and high-speed inspection for foreign matter contaminants. Patented wavelength switching method.
Performs scratch inspections, surface inspections and internal inspections to detect foreign matter of various samples including liquid crystal glass substrates, films, and resin materials / plastics, etc.
The inspection light source wavelength is automatically switched according to the customer's sample to perform high-speed, high-resolution inspections.
Customizable for installation space problems and resolution according to customer specifications.